Sizing algorithm with continuous customizable clipping

摘要

Polygon sizing is required during Mask Data Preparation in order to generate derived layersand as process bias to account for edge effects of etching. Two main features are required forpolygon sizing algorithms to be useful in Mask Data Preparation software: correctness to avoid datacorruption and clipping of the projection of acute angle vertices to limit connectivity modifications.However, current available solutions are either based on heuristics, producing corrupted results forcertain input, or based on algorithms which may fail to maintain original design's connectivity forcertain input. A novel algorithm including customizable clipping is presented.