P-10: The Development of an Automatic Processing System for Large-Area Photomasks

摘要

A key element to the production of cost effective FPD's is the availability of Large Area Photomasks (LAMs). This paper presents the design, construction, evaluation and transfer into production of an automatic processing system. The large plate processing system, developed jointly by Photronics Colorado and Planar Systems through a NIST project is capable of developing, etching, striping and drying LAMs as large as 812mm by 812mm. Presented are the steps taken to go from concept to working production system.