With the appearance of micromachined mechanical elements and nanotechnology, increased demand can be observed for coordinate measuring systems having submicron accuracy. Probes are major components of such a coordinate measuring machine. They contribute to a large extend to measurement uncertainty of the CMM. In this paper a new low cost design is presented. The moving element of the probe head consists of the stylus and a crossform intermediate body with a small aluminium enhanced mirror at two end and at the center. The intermediate body is suspended on four springs made of berillium-copper folies. The displacement of the probe tip is calculated from the displacement and the rotations of the mirrors measured by modified optical pick-ups.
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