The Role of Ion-assisted Deposition in PVD

机译：离子辅助沉积在PVD中的作用

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An optimal energy interval in ion-assisted deposition of high crystalline films is predicted in the modeling of ion impacting on surface. The result is in good agreement with the presented experiments. The possible application of the evaluation of ion role for the fabrication of potential thin film materials is expected.

机译：在表面撞击表面的建模中预测了高结晶膜的离子辅助沉积中的最佳能量间隔。结果与所提出的实验一致。预期了用于制备潜在薄膜材料的离子作用评价的可能施加。

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《International Conference on Thin Film Physics and Applications》|2008年||共2页
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Z. Q. Ma; C. B. Feng; X. Tang; F. Li; B. He; B. B. Shi;
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中图分类材料;
关键词
ion-assisted deposition; surface morphology; texture modeling;

机译：离子辅助沉积;表面形态;纹理建模;

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专利

1. Role of the substrate on the magnetic anisotropy of magnetite thin films grown by ion-assisted deposition [J] . Prieto Pilar, Emilio Prieto Jose, Gargallo-Caballero Raquel, Applied Surface Science . 2015,第DECa30期

机译：衬底对离子辅助沉积生长磁铁矿薄膜磁各向异性的作用
2. Ion-assisted stimulating deposition of Pt nanoparticles in SiO_2 and optical properties [J] . Andrey L. Stepanov Applied Physics . 2021,第8期

机译：SiO_2和光学性质中Pt纳米颗粒的离子辅助刺激沉积
3. Fabrication of Ultralow Stress TiO2/SiO2 Optical Coatings by Plasma Ion-Assisted Deposition [J] . Chun Guo, Mingdong Kong Coatings . 2020,第8期

机译：通过等离子体离子辅助沉积制备超级应力TiO2 / SiO2光学涂层的制造
4. The Role of Ion-assisted Deposition in PVD [C] . Z. Q. Ma, C. B. Feng, X. Tang, International Conference on Thin Film Physics and Applications . 2008

机译：离子辅助沉积在PVD中的作用
5. Characterization of conducting polymer films grown via surface polymerization by ion-assisted deposition. [D] . Tepavcevic, Sanja. 2006

机译：通过离子辅助沉积通过表面聚合生长的导电聚合物薄膜的表征。
6. Pushing the Envelope: The Role of Outer Envelope Proteins PVD1 and PVD2 in Plastid Division [O] . Nancy A. Eckardt 2006

机译：推信封：外信封蛋白质PVD1和PVD2在质体分裂中的作用。
7. Role of the substrate on the magnetic anisotropy of magnetite thin films grown by ion-assisted deposition [O] . Prieto Pilar, Prieto José Emilio, Gargallo-Caballero R., 2017

机译：衬底对离子辅助沉积生长磁铁矿薄膜磁各向异性的作用
8. Microstructural Studies of IAD (Ion-Assisted Deposition) and PVD Cr Coatings by Cross Section Transmission Electron Microscopy [R] . Cheng, C. C. , Erck, R. A. , Fenske, G. R. 1988

机译：用横截面透射电子显微镜研究IaD（离子辅助沉积）和pVD Cr涂层的微观结构

The Role of Ion-assisted Deposition in PVD

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