Preventing arcing damage on radio frequency device wafer by controlling ESD resistivity level of water for saw and wash

摘要

The current Electrostatic Discharge (ESD) resistivity limit of water during the wafer saw and wash process is found to induce polyimide tribocharging. Accumulated static energy discharges on metal 6 of the Radio Frequency (RF) device, in the form of electrical arcs, cause dielectric passivation layer breakdown and Electrical Overstress (EOS). To solve this problem, an experiment is done to determine the most efficient ESD resistivity level of water for arcing damage prevention.