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Inkjet Patterning of UV Curable Etching Resist for Flexible Conductive Circuit Electrodes

机译:用于柔性导电电路电极的UV固化蚀刻抗蚀剂的喷墨图案化

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This paper discloses the recent evolution of flexible substrates with conductive film patterns by use of inkjet patterning of UV curable resist, etching process, and then striping the resist film in sequence. The UV curable ink has a viscosity of about 8~20cps and surface tension of 30~40 dyne/cm at operation temperature, which is appropriate for the inkjet printing process conducted on the ink at an elevated temperature. Experimental results indicated that the single drop size on the conductive film is about 75~80μm. For the continuous line pattern, the minimum line width and line spacing of the printed resist can reach from 80 μm /60 μm to 80 μm/ 20μm, and the resist thin film thickness is 5μm. After the etching and striping process, the conductive line width and line spacing can be 80 μm/ 20 μm. This low-cost and easy process is potentially promising to flexible electronics in the future.
机译:本文公开了通过使用UV可固化抗蚀剂,蚀刻工艺的喷墨图案,然后依次缠绕抗蚀剂膜的喷墨图案,最近具有导电膜图案的柔性基板的进化。 UV可固化油墨的粘度约为8〜20cps,并且在操作温度下为30〜40达温/ cm的表面张力,其适用于在升高温度下在墨水上进行的喷墨印刷过程。实验结果表明,导电膜上的单滴尺寸约为75〜80μm。对于连续线图案,印刷抗蚀剂的最小线宽和线间距可达到80μm/60μm至80μm/20μm,抗蚀剂薄膜厚度为5μm。在蚀刻和条纹工艺之后,导电线宽和线间距可以是80μm/20μm。这种低成本和简单的过程在未来可能对柔性电子产品有望。

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