FIELD TESTS OF RELEASE, IGNITION AND EXPLOSION FROM SILANE CYLINDER VALVE AND GAS CABINET

摘要

This work presents field test results of silane releases from the cylinder valve and into a gas cabinet. For safety reasons the release was from a cylinder valve that was attached to a cylinder cut in half. This was attached to the test system which was setup remotely from the test valve. The following release tests were performed: (1) Leak from DISS valve outlet connector with and without a restrict flow orifice (RFO), (2) Leak directly from cylinder valve with and without a RFO, (3) Leak from cylinder valve stem retainer thread. In addition, high pressure releases from a 1/8” and 1/4” tube into a ventilated single cylinder gas cabinet were also performed. Release pressure varied from 120 psig to the full cylinder pressure of 1250 psig. Both digital video and high speed cameras were used to record the ignition, pop, or explosion behavior. The results clearly demonstrated the value of an RFO and will be useful for safety improvement in the semiconductor and TFT-LCD industries.