Analysis and Design of the PDMS Pneumatic Peristaltic Micropump Structure

摘要

A polydimethylsiloxane (PDMS) pneumatic peristaltic micropump was made by using multilayer soft lithography technique. The primary factors affecting the flow velocity of the PDMS micropump were proposed through designing and analyzing its structure and working principle. The flow rate of the PDMS micropump was increased with the optimized micropump parameters.