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Dependence of thin film growth on substrate temperature Kinetic Monte Carlo simulation of thin film growth

机译：薄膜生长对薄膜生长衬底温度动力学墨西哥岩体模拟的依赖性

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摘要

A three-dimensional KMC technique has been developed for simulating growth of thin films. The surface roughness and the relative density of the films were simulated as functions of growth substrate temperature and deposition rate.

机译：已经开发了一种用于模拟薄膜的生长的三维KMC技术。薄膜的表面粗糙度和相对密度被模拟为生长衬底温度和沉积速率的函数。

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《International Nano-Optoelectronics Workshop 》|2007年||共2页
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Xiao-Ping Zheng; Pei-Feng Zhang; Duo-Wang Fan;
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中图分类 TP241-53;
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Dependence of thin film growth on substrate temperature Kinetic Monte Carlo simulation of thin film growth

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