Fabrication and Characterization of a Lateral, Microfabricated Carbon Nanotube Ionization Source for a Miniaturized Mass Spectrometer

摘要

CNT-based MEMS Ion Source fabricated that shows a 10X improvement in the ratio of ion current to electron current compared to a previous device at similar pressures. The ion currents ranged from pA to (mu)A in the 0.1 mTorr to 0.1 Torr pressure range. Improved performance can be attributed increased electron current and collection efficiency.