(19th report) Study on Biochemical IC Chip Family - The optimal design of micro multi-directional switching valve chip with built-in micro solenoid

摘要

We have developed the world's first 10-way micro switching valve chip as one of Biochemical IC chip. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700kPa). But this valve was switched by external solenoid. To build the micro solenoid into the chip, the valve design parameters (the height of the silicon rubber ring and the compression force to the rotor) affecting the valve performance (the leakage pressure and the rotation force of the rotor) were optimized.