SINA R2 - A NEW MODULAR APPROACH FOR PRODUCTION EQUIPMENT FOR LARGE SCALE IN-LINE PROCESSING OF CRYSTALLINE SILICON SOLAR CELLS

摘要

Roth & Rau AG is introducing the next generation of in-line equipment for crystalline silicon solar cell production. It is based on the well-known SiNA system, which has been sold more than 270 times. In contrast to the current system the new system is being characterized by its extremely high grade of modularization. There are three base modules: a lock module for loading and unloading wafers and the separation between different deposition or etching processes, a buffer module for pre-heating or cooling down the wafers, and a process module for plasma etching or deposition processes. The modules are available in two sizes: the SiNA L with a carrier load of 25 wafers (156 × 156 mm~2) and the SiNA XL with a carrier load of 50 wafers. With those two sizes the throughput of the SiNA is scalable and one system is therefore capable for solar cell production lines with an annual capacity from 30 up to 100 MW_p.