IMPLICATIONS OF NON-LINEAR POOLE-FRENKEL PLOTS ON HIGH-k DIELECTRIC LEAKAGE

摘要

The implications of a modem model of the Poole-Frenkel (PF) effect on the characterization of high-k dielectric leakage are investigated. The classical PF model predicts a characteristic graph known as the PF plot which is linear for all fields, and a single linear region on such a plot of measured current is taken as evidence of PF emission. However, the modern model of the PF effect, incorporating the Fermi-Dirac function, is more accurate, and we show that this model predicts non-linear PF plots. The implications for characterizing dielectric leakage with the modern model are discussed. Observation and characterization of a non-linear PF plot of measured leakage current in thin Al203 films is presented.