Design of nanosecond pulse laser micromachining system based on PMAC

摘要

Pulse laser micromachining technology, as a branch of laser processing technology, has been widely used in MEMS device processing, aviation, instruments fabrication, circuit board design etc.. In this paper, a novel nanosecond pulse laser micromachining system is presented, which consists of nanosecond pulse LASER, optical path mechanical structure, transmission system, motion control system. Nanosecond pulse UV laser, with 355 nm wavelength and 40ns pulse width, is chosen as the light source. Optical path mechanical structure is designed to get ideal result of laser focusing. Motion control system, combining PMAC card with the PC software, can control the 3-D motion platform and complete microstructure processing. By CCD monitoring system, researchers can get real-time detection on the effect of laser beam focusing and processing process.? (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.