The research on making large-size aspherical mirrors by vacuum evaporation technique

摘要

Along with development and progress of modern optics manufacturing technology and optical test technology, there are a series of modern polishing technologies based on the application of computer software and hardware, such as CCOS(Computer Controlled Optical Surfacing), Stress Lap Polishing, Magnetorheological Finishing, Ion Beam Milling, etc. The emergence of these new technologies promotes aspherical mirrors widely used in optical system. Vacuum evaporation technique is applied widely on making optical coating. In this paper, we discuss the feasibility on applying vacuum evaporation technique to making large-size aspherical mirrors. The technology is to take original sphere as substrate, deposit film of certain thickness distribution on the surface, then get aspherical mirror. This technology has a special advantage and tremendous development space in the off-axis aspheric processing, silicon carbide aspheric surface processing and modification, super-glossy aspheric processing and great telescope mirror batch processing.