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FABRICATION AND PROPERTIES OF HIGH THERMAL CONDUCTIVITY SILICON NITRIDE

机译:高导热硅氮化物的制造与性能

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This paper gives an overview on the recent developments of high-thermal-conductivity silicon nitride ceramics. Some major factors lowering thermal conductivity of silicon nitride are clarified and some potential approaches to realize high thermal conductivity are described. Then, the recent achievements on the silicon nitride fabricated by a sintered reaction bonded silicon nitride (SRBSN) process are presented. Due to the reduction of the content of impurity oxygen dissolved in the lattice, the silicon nitride ceramics attained substantially higher thermal conductivities, compared to that of the conventional gas-pressure sintered silicon nitride, while the microstructures and bending strengths are similar to each other between these two types of materials. Moreover, further improvement of the thermal conductivity is possible by increasing the β/α phase ratio of the nitrided compact, and a silicon nitride with a thermal conductivity as high as 177 W/(m ? K) and a high fracture toughness of 11.2 MPa-m~(1/2) was developed.
机译:本文概述了最近的高导热系氮化硅陶瓷的发展。阐明了降低氮化硅导热率的一些主要因素,并且描述了实现高导热率的一些潜在方法。然后,提出了近期由烧结反应键合氮化硅(SRBSN)工艺制造的氮化硅的近氮化物的成果。由于溶解在晶格杂质的氧含量的降低,硅氮化物陶瓷达到显着更高的热导率,相比于烧结氮化硅传统的气体压力,而微结构和弯曲强度是彼此相似之间这两种材料。此外,通过增加氮带的β/α相比和具有高达177w /(m≤k)的β/α相比,可以提高导热率的β/α相比和11.2MPa的高断裂韧性来进一步改善导热率的进一步改善。 -M〜(1/2)开发。

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