THE FIRST SUB-DEG/HR BIAS STABILITY, SILICON-MICROFABRICATED GYROSCOPE

摘要

The first sub-deg/hr bias stability gyroscope is fabricated in single crystalline silicon using the SBM (Sacrificial Bulk Micromachining) process. The quadrature error is a major concern in MEMS gyroscopes for high performance. To minimize the quadrature error the fabricated gyroscope has a very flat bottom surface, which gives a highly symmetrical proof mass and springs, which in turn, provides high performance levels with significantly reduced the quadrature error. The fabricated gyroscope has the bandwidth of 58 Hz, and the 4-hr bias stability of 0.3 deg/hr.