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Strength Evaluation of Borosilicate Glass Coated with Thin Ceramic Films by Radio-Frequency Sputtering

机译:射频溅射用薄陶瓷膜涂覆硼硅酸盐玻璃的强度评价

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In recent investigations, it is reported that glass sputtered with ceramic thin film is functionally used as magnetic/electronic device materials [1-3] as well as optical ones. In functional usages and/or mechanical applications of coated glass materials, the information on strength of such materials is also required to guarantee the integrity during service. In this study, strength properties of a borosilicate glass coated with alumina, silicon carbide, or titanium nitride were experimentally investigated to clarify the difference in the properties attributed to material kinds of ceramic coating. A radio-frequency (RF) magnetron sputtering method was adopted in producing thin ceramic films on glass. Coated glass materials were prepared by changing a combination of RF output power and film thickness for each ceramic coating material. Roughness and hardness of coating ceramic film are recognized to be important factors for tribological usage. So, roughness and hardness were also measured as surface properties which may affect the strength of coated materials. Since tensile tests of brittle glass or ceramic materials are very difficult to be performed in adequate evaluation of their strength characteristics, bending tests of the glass coated under several conditions were conducted instead of tensile tests in this work. The dependencies of strength properties of coated materials on the thickness of ceramic film and on the RF output power were also investigated to clarify a suitable sputtering condition. Finally, a new procedure to estimate the strength of coated glass was proposed by using the surface properties of coating film as well as sputtering time, and its applicability was discussed in comparison with experimental results.
机译:在最近的研究中,据报道,用陶瓷薄膜溅射的玻璃在功能上用作磁/电子器件材料[1-3]以及光学器件。在涂覆玻璃材料的功能使用和/或机械应用中,还需要提供关于这些材料的强度的信息来保证服务期间的完整性。在该研究中,通过实验研究涂有氧化铝,碳化硅或氮化钛的硼硅酸盐玻璃的强度性质,以阐明归因于材料种类的陶瓷涂层的性质的差异。采用射频(RF)磁控溅射方法在玻璃上制造薄陶瓷薄膜。通过改变每个陶瓷涂料的RF输出功率和膜厚度的组合来制备涂覆的玻璃材料。涂料陶瓷膜的粗糙度和硬度被认为是摩擦学使用的重要因素。因此,还测量粗糙度和硬度作为表面性质,这可能影响涂层材料的强度。由于在足够的评价它们的强度特性时非常难以进行脆性玻璃或陶瓷材料的拉伸试验,因此在几种条件下涂覆在几种条件下的玻璃的弯曲试验代替该工作中的拉伸试验。还研究了涂覆材料对陶瓷膜厚度和RF输出功率的强度特性的依赖性,以阐明合适的溅射条件。最后,通过使用涂膜的表面性能以及溅射时间提出了一种估计涂覆玻璃强度的新方法,与实验结果相比,讨论了其适用性。

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