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ELECTROSTATIC SPRAY DEPOSITION OF YSZ THIN FILMS WITH DIFFERENT MICROSTRUCTURES

机译:ysz薄膜用不同微结构的静电喷射沉积

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Electrostatic spray deposition (BSD) technique was applied to deposit thin, dense yttria stabilized zirconia (YSZ) electrolyte films. The YSZ films were deposited on dense substrates (stainless steel, glass and alumina) and porous NiO-YSZ substrates at 400 deg C. The influence on film morphology of the process parameters such as: salt concentration, polymer additive, deposition time, and substrate nature was studied. A smooth dense film was successfully deposited using the precursor solution based on butyl carbitol and ethanol solvent mixture. A rough porous film was formed when the solvent mixture containing butyl carbitol (40 vol percent), water (40 vol percent), and ethanol (20 vol percent) was sprayed. In this work, we have chosen polyethylene glycol (PEG) polymer as additive to modify the properties of the precursor solutions. The results demonstrated a significant role of the additive on the droplet spreading. The nature of a substrate was not playing a significant role in the film growth.
机译:施用静电喷雾沉积(BSD)技术以沉积薄,致密的ytTria稳定的氧化锆(YSZ)电解质膜。 ysz薄膜沉积在400℃的致密基板(不锈钢,玻璃和氧化铝)和多孔NiO-ysz底物上沉积。对工艺参数的影响,例如:盐浓度,聚合物添加剂,沉积时间和衬底的影响自然是研究过的。使用基于丁基卡比哥和乙醇溶剂混合物的前体溶液成功沉积平滑的致密膜。当含有丁基市丁基(40体积%),水(40 vol百分比)和乙醇(20摄积百分比)喷洒的溶剂混合物时,形成粗糙的多孔膜。在这项工作中,我们选择聚乙二醇(PEG)聚合物作为添加剂以改变前体溶液的性质。结果表明添加剂对液滴扩散的重要作用。底物的性质在薄膜生长中没有发挥重要作用。

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