STATIC SYNERGETICS ALGORITHM: A NEW VERSATILE TOOL FOR REAL-TIME QA WITH INTERACTIVE FEEDBACK TO PROCESS QC QUALITY AND YIELD OPTIMIZATION OF MATERIALS AND DEVICES

摘要

The time-independent, static limit of Haken's synergetics, the dynamics of pattern evolution out of chaos, in analogy with material, device, or system evolution out of input materials during processing, is used as a universal, scalable, reversible, mathematical algorithm and or experimental model (not a theory nor process (specific) model) to provide a real-time, interactive quality assurance (QA) and feedback to quality-control (QC) to be coupled in parallel to a specific particular process theory or model. The input to processing QA and QC is its output, any of the complex, frequency-dependent electronic, electrical, dielectric, mechanical/viscoelastic, optical or magnetic property Functions of the processing produced defect/imperfection disorder distribution Pattern at that particular moment in the processing, the instantaneous Pattern input of an external radiation diffraction-pattern. The Algorithm provides a flexible versatile tool to relate processing induced defect distribution Pattern universally to Function/functional property performance, as designer and/or user specification, no matter however (mode physics/chemistry, ...specificity) in the processing the defects are produced, on the scales of material, device or system/IC. Additionally the Algorithm can be utilized in forward Pattern input-Function output, or a backward Function input-Pattern output to trace back from Function specification failure to defect distribution Pattern cause.