Recently, a number of research groups around the world have developed ophthalmic instruments capable of in vivo diffraction limited imaging of the human retina. Adaptive optics was used in these systems to compensate for the optical aberrations of the eye and provide high contrast, high resolution images. Such compensation uses a wavefront sensor and a wavefront corrector (usually a deformable mirror) coordinated in a closed- loop control system that continuously works to counteract aberrations. While those experiments produced promising results, the deformable mirrors have had insufficient range of motion to permit full correction of the large amplitude aberrations of the eye expected in a normal population of human subjects. Other retinal imaging systems developed to date with MEMS (micro-electromechanical systems) DMs suffer similar limitations. This paper describes the design, manufacture and testing of a 6um stroke polysilicon surface micromachined deformable mirror that, coupled with an new optical method to double the effective stroke of the MEMS-DM, will permit diffraction-limited retinal imaging through dilated pupils in at least 90% of the human population. A novel optical design using spherical mirrors provides a double pass of the wavefront over the deformable mirror such that a 6um mirror displacement results in 12um of wavefront compensation which could correct for 24um of wavefront error. Details of this design are discussed. Testing of the effective wavefront modification was performed using a commercial wavefront sensor. Results are presented demonstrating improvement in the amplitude of wavefront control using an existing high-degree of freedom MEMS deformable mirror.
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