Analyses of laser-assisted removal of adhering particles from silicon surfaces

摘要

Mechanisms involved in laser-assisted particle removal are investigated by using combined theoretical and experimental approaches. For the first time, experiments have been performed to evaluate the influence of the pulse shape on the laser process efficiency. The contribution of the inertia force in cleaning has been demonstrated but not as the dominant mechanism. Surface temperature, dynamics of materials and adhesion characteristics are calculated for the experimental conditions in order to examine their role in dry laser cleaning.