Modelling of a CCP-RF Discharge Used For TheSimulation Of Titan's Chemistry

摘要

This paper reports the modelling of CCP-RF discharges (13.56 MHz) in pure nitrogen,produced within a cylindrical parallel-plate reactor, similar to a GEC reference cell surroundedby a lateral grounded grid, at 0.1-2 mbar pressures and 10-50 W coupled powers. This study is afirst step in simulating Titan's chemistry at laboratory scale, using the PAMPRE experiment.Modelling results are compared with experimental measurements of the average electrondensity, and the self-bias potential at the polarized electrode.