Manufacture of Micro-Hole Array for Planar Porous Aerostatic Bearing with Dual Restrictive Layer Using Picosecond Laser

摘要

In the development of micro/meso machining systems, aerostatic bearing has become the key technology to achieve the accuracy requirement. The porous air bearing with high load capacity, good stiffness and stability characteristics were suitable for the miniaturization of mechanical bearing component. But it is difficult to control precisely the material's pore size, porosity, and permeability. A new porous aerostatic bearing with dual restrictive layer made by micro holes array on the loading surface was investigated in this study. And study focus on manufacture micro-hole array by picosecond laser. The experiment results show micro holes diameter less 100μm and bearing flatness<1μm. By laser processing parameters include laser energy, holes pitch, bearing flatness and laser instability both main effect factor. The holes size range about 60～80μm between on planar porous aerostatic bearing with dual restrictive layer can be achieved.