This paper presents the design details of an optical chemical sensor based on a Mach-Zehnder Interferometer (MZI), fabricated with MOS compatible processes and materials. The fabricated waveguides showed a light attenuation around 2 dB/cm for TE0 propagation (632.8nm). Using a simulator software, we showed that the designed optical chemical sensor has a high sensitivity for the effective refractive index changes, around 10E-4, and it allows us to have several possibilities of application of these sensors as: protein absorption in modified surfaces (biotechnology), surface immobilized anti-body action (medicine) and others.
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