Many types of miniaturized machine tools have been developed for machining micro mechanical parts and to save energy, space and resources [1-3]. The next targets for the miniaturized machine tools will be multi-axis and ultra-precision machining. Conventional multi-axis machine tools are constructed from several stacked one-degree-of-freedom (one-DOF) positioning mechanisms to realize multi-degrees-of-freedom motion [4]. The stacked positioning mechanism is not suitable for miniaturization or ultra-precision motion control, due to the cumulative effect of the space occupied by several one-DOF positioning mechanisms and non-collocation of actuators with displacement feedback sensors.
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