A PRECISION ACTIVE AEROSTATIC SPINDLE WITH AN AXIAL POSITIONING ACTUATOR

摘要

A precision active aerostatic spindle with an axial positioning actuator was proposed and tested in order to realize a compact nano-machine tool. The spindle could rotate at over 15,000 rpm and had a positioning range and a resolution of ±5 mm and 24.7 nm, respectively, at 15,000 rpm. Future work will involve multi-axis and micro milling machining using the X-Y-Θ. table system and this spindle. This research was supported by an Industrial Technology Research Grant Program in ' 02 from NEDO of Japan. The authors gratefully acknowledge the contribution of Dr. M. Fukuda of NTT for fabrication of the experimental spindle.