A Novel Flow Sensor in Hydraulic System

摘要

This paper presents a built-in flow sensor for hydraulic system use. Unlike traditional counter parts, a MEMS (MicroElectroMechanical Systems) differential pressure-sensing element and a low cost throttle are integrated together in this sensor. It is of better spatial resolution and cause fewer losses than the widely used orifice flow meter. By theoretical analysis and experimental tests we have achieved an optimized design strategy.