DEVELOPMENT OF A TECHNIQUE FOR THE DETERMINATION OF METROLOGICAL PARAMETERS OF TECHNOLOGICAL SYSTEM CLWS-300/C FOR SYNTHESIS OF HIGH PRECISION ANGULAR MEASURING STRUCTURES

摘要

A method to measure the error of topology formation of angular measuring structures has been proposed. This method makes it possible to identify the components that distort the results of measurement. It has been shown that the destabilizing factors that accompany the process of measuring the errors of topology formation of high-precision (≈ 1″) angular measuring structures introduce distortions comparable to the parameter value being inspected. It has been proved, by manufacturing a small set of products of the same type, that the raster scanning technology provides the stable and reproducible formation of angular measuring structures with a topology error of about ±1″.