A process for preparing metrological structures particularly suitable for the determination of the precision in devices which measure the distance on treated substrates

摘要

process for the realization of metrological structures particularly for the analysis of the accuracy of instruments for measuring alignment on substrates processed the peculiarity of which.ste in metrological structures having profiles of measure carried out on areas of substrate and on areas processed industrially on a single wafer.the profiles of size distributions are detectable with statistical machine to measure for the analysis of accuracy of measurement of the machines themselves.