Micro-semiconductor tactile sensor for the automatic obstacle-avoidance system of endoscope

摘要

The paper studies a tactile sensor. This micro-semiconductor tactile sensor is made of silicon and can be used for the automatic obstacle-avoidance system of endoscope. This paper presents details of the principle of the micro silicon semiconductor sensor at first. Then its design is presented. The application of the sensor in intelligent endoscope system which uses MEMS technology is also explained. At last, the experiment results and analysis are presented.