Temporally controlling heat flux for micro feature reproduction using Miniature injection mold

摘要

This paper introduces a miniature injection mold with diameter 30mm and length 38.5mm, which allows rapid heating and cooling, to optimize the solidification timing by controlling heat flux not spatially but temporally. On the surface of a box shape cavity, sub-micron grooves was machined using Focused Ion Beam. Using this mold we raised the mold temperature upon injection from 100 to 250°C and time controlled the heat flux. This methods allowed us to produce micro features of 300nm.