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General interferometric approaches based on variable incidence angle method for refractive index and thickness measurement of birefringent multi-medium objects

机译:基于可变入射角法的折射率和双折射多介质物体厚度测量的一般干涉方法

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The optical properties of the birefringent multi-objects (heterogeneous objects) can simply be determined if the thickness of each layer is known. The highly accurate measurement of the thickness of each layer of the birefringent multi-object is not trivial operation and it should be performed with more care. Therefore, oblique incidence Pluta birefracting microinterferometer is used for highly accurate thickness measurement. In the presented paper, two general interferometric approaches are used for refractive indices and thickness measurement of each layer of the birefringent multi-medium objects. This measurement can be done when only the extraordinary fringe deflection in the image of each layer is measured as function of the incidence angle.
机译:如果已知每个层的厚度,则可以简单地确定双折射多物体(异质物体)的光学性质。对双折射多物体的每层厚度的高度精确测量不是微不足道的操作,并且应该用更多的护理进行。因此,倾斜入射型斑块二射微型干扰仪用于高精度的厚度测量。在本文的纸张中,两个一般干涉式方法用于双折射多介质物体的每层的折射率和厚度测量。当仅测量每个层的图像中的非凡条纹偏转时,可以进行该测量作为入射角的函数测量。

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