Generation of uniformly spaced and nano-sized structures by interfered femtosecond laser beams

摘要

To correlate femtosecond laser beams in wide region and achieve laser ablation, beam correlators based on coherent optical system were developed. By processing thin films using the systems, uniformly spaced and nano-sized structures were generated. The generated structures were nanohole. grating, nanobump, bead on bump, standing bead. The shape of the structure changed on changing the laser fluence, the number of beams, and the correlation parameters. By peeling the structures, nano-sized materials such as nanomesh and nanobelt were generated.