Attempt at EDM of Electrically Conductive Diamond and its Application to Miniature Mold Processing

摘要

Due to the possibility of precision machining of the recently developed electrically conductive diamond by utilizing the well developed EDM technology, a wide range of its application to micro sized molds for miniature lenses as well as various microelectronic products has been made possible. This research is an attempt to make micro diamond molds for micro lenses (less than 1mm in diameter). The material removal rate obtained in initial experiments is higher than any of the conventional processes, presently used for the machining of diamond. In this attempt, the effect of various EDM parameters in the EDM of electrically conductive diamond with respect to shape control, surface finish and efficiency is investigated.