Hybrid optical MEMS demodulator for optical fiber sensing

机译：用于光纤感测的混合光学MEMS解调器

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Design, experimental evaluation and performance of a tunable optical filter based on hybrid MOEMS is presented. The device meets the demodulation requirements for Fiber Bragg Grating sensors reaching a repeatable tuning range over 400pm

机译：介绍了基于混合MOEMS的可调光学滤波器的设计，实验评价和性能。该器件符合光纤布拉格光栅传感器的解调要求，该传感器达到可重复调谐范围，范围为4 00pm

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《European Workshop on Optical Fibre Sensors》|2004年||共4页
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Anartz Unamuno; Lijie Li; Deepak Uttamchandani; SPIE-The International Society for Optical Engineering; SPIE v.5502;
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中图分类 N-532;
关键词
MOEMS; microactuators; microsystems; fiber bragg grating;

机译：Moems;微致动器;微系统;光纤布拉格光栅;

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专利

1. Fiber Bragg grating demodulator based on hybrid optical MEMS [J] . Unamuno A., Lijie Li, Uttamchandani D. IEEE journal of selected topics in quantum electronics . 2004,第3期

机译：基于混合光学MEMS的光纤布拉格光栅解调器
2. Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers [J] . Saran A., Abeysinghe DC., Flenniken R., Journal of Micromechanics and Microengineering . 2003,第2期

机译：光纤到硅的阳极键合，用于集成MEMS器件和光纤
3. Optical DPSK Demodulator Based on$pi$-Phase-Shifted Fiber Bragg Grating With an Optically Tunable Phase Shifter [J] . Kim T.-Y., Hanawa M., Kim S.-J., IEEE Photonics Technology Letters . 2006,第17期

机译：基于π相移光纤布拉格光栅和光可调移相器的DPSK解调器
4. Hybrid optical MEMS demodulator for optical fiber sensing [C] . Anartz Unamuno, Lijie Li, Deepak Uttamchandani, European Workshop on Optical Fibre Sensors . 2004

机译：用于光纤感测的混合光学MEMS解调器
5. Fiber specklegram sensing using hybrid optical information processors. [D] . Pan, Kun. 1995

机译：使用混合光学信息处理器进行光纤散斑图感测。
6. Hybrid Fiber-Optic Sensing Integrating Brillouin Optical Time-Domain Analysis and Fiber Bragg Grating for Long-Range Two-Parameter Measurement [O] . Shien-Kuei Liaw, Chi-Wen Liao, Meng-Hsuan Tsai, 2021

机译：混合光纤感测集成布里渊光学时域分析和光纤布拉格光栅用于远程双参数测量
7. Design and optimization of optical, fiber based PSK demodulators for high-bit-rate optical networks [O] . Chen Xiaoyong 2015

机译：用于高比特率光网络的基于光纤的PSK解调器的设计和优化

Hybrid optical MEMS demodulator for optical fiber sensing

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