The cupreous hollow probe of 0.7approx3 mm thickness is an important component in the laser-beam quality diagnostic instrument which is used to measure laser parameters such as beam mode structure, focusing spot morphology of high power laser. But the microhole in the probe with four types of diameter (10(mu)m, 20(mu)m, 30(mu)m, 40(mu)m) is easily destroyed, and hard to process by traditional technique. In this paper a frequency tripled DPSS laser ((lambda)(velence)355nm, P_(max)(velence)10W, (tau)(velence)15ns, M~(2)<1.2) was employed to drill microhole on the probe. The technique is studied and the microholes were obtained with laser pulse repetition rate of 2000Hz and corresponding power of 1.16W. The diameter of minimum microhole obtained is 6.57(mu)m. They were successfully used in the instrument of the laser quality diagnostic. In addition, the relationship of the microholes' diameter and the distance of the work piece away from the focusing spot was also investigated.
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