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Constrained-sintered, Low-temperature Co-fired Ceramic for 1C Packaging Applications

机译:约束烧结,低温共烧陶瓷用于1C包装应用

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The x- and y-shrinkages of free-sintered LTCC circuits have been variously reported in the range of 8 to 20%. For well-characterized LTCC systems these numbers are predictable and reproducible and can be compensated for by appropriate resizing of the phototools. What is not predictable is the tolerance associated with these numbers. The shrinkage tolerance of a free-sintered LTCC substrate is at best ±0.15%. Thus, the uncertainty in the true position of a point 0.5cm along the diagonal from a corner of a 20cm × 20cm fired laminate is a circle of 409μm (16.1mil) diameter. This is a significant number and the only way to compensate for it is by making circuit features large enough to overpower it or by making substrates small enough to render it insignificant. Thus it represents an upper limit on the usable substrate size and a lower limit on the size of the components used to populate it. Through the use of constrained sintering (zero-shrink) processes the overall x- and y-shrinkage of a green ceramic laminate can be reduced to almost zero and, more importantly, the dimensional tolerance of the structure can be improved by at least 5 times. Under the same criterion as above this represents a circle of uncertainty of ~80μm in diameter - something which is much more controllable than in the free sintering case. Both pressureless and pressure-assisted versions of constrained sintering are available. Two pressureless methods are discussed and compared in this paper. The first is release tape based (PLAS) and the second is self-constraining tape based (SCPLAS).
机译:自由烧结LTCC电路的X和Y型收缩率为8至20%的各种报道。对于具有良好的LTCC系统,这些数字是可预测和可再现的,并且可以通过适当调整光透镜的调整来补偿。不可预测的是与这些数字相关的公差。自由烧结LTCC基板的收缩耐受性最佳±0.15%。因此,从20cm×20cm烧制层压板的拐角沿着对角线沿着沿着20cm×20cm烧制层压板的角度的真实位置的不确定性是409μm(16.1mil)直径的圆形。这是一个重要的数量,唯一的措施是通过使电路特征足够大,以使其压缩或通过使基板足够小,以使其微不足道。因此,它代表了可用衬底尺寸的上限和用于填充它的组件的大小的下限。通过使用约束烧结(零收缩)处理绿色陶瓷层压板的整体X和Y型收缩率可以减少到几乎为零,更重要的是,结构的尺寸容差可以提高至少5倍。在与上述相同的标准下,表示直径约为80μm的不确定度的圆圈 - 这比自由烧结盒更可控的东西。无压力和压力辅助版本的受限烧结可用。在本文中讨论了两个无压方法。首先是基于释放带(PLA),第二个是基于自限制的带(SCPLA)。

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