A 134-pixel CMOS Sensor for Combined Time-of-Flight and Optical Triangulation 3-D Imaging

摘要

This paper describes the design and characterization of a linear sensor suitable for distance measurements based on both Optical Triangulation (OT) and Indirect Time of Flight (ITOF) techniques. A 134-pixel array has been fabricated in a standard 0.35-μm 2P4M 3.3V CMOS technology, and a complete characterization has been performed showing sub-mm precision in OT mode at 131kvoxel/s in the short range, and a maximum of 8.5% error in I-TOF mode at 125voxel/s for target distance up to 5m.