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Characterization of a single rotor stage of a medium capacity Turbo Molecular Pump

机译:介质容量涡轮分子泵单个转子级的表征

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Centre for Advanced Technology has taken up the development of medium capacity Turbo Molecular Pump of pumping speed of 400 lt./s. A theoretical study has been conducted regarding the various parameters of TMP rotor geometry. To assess the theoretical predicted data, an experimental set up has been designed, fabricated and assembled. This is a single stage TMP rotor evaluation machine to check the performance of individual stage of TMP rotor .The top stage of rotor is being mounted in this set up and the various rotor geometry parameters has been tested up to a rotational speed of 40,000 rpm. The effect of rotor speed and the base pressure on pumping speed and compression ratio will be reported in this paper along with the details of experimental set up and procedure.
机译:先进技术中心已经占据了400 LT./s的泵送速度的中等容量涡轮分子泵。关于TMP转子几何形状的各种参数进行了理论研究。为了评估理论预测数据,设计,制造和组装了一种实验组。这是一个单级TMP转子评估机,用于检查TMP转子的单个级的性能。转子的顶部安装在该设置中,并且各种转子几何参数已经过40,000转的转速。本文将报道转子速度和基础压力对泵送速度和压缩比的影响以及实验设置和程序的细节。

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