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Performance Testing of a Titanium Sublimation Pump

机译:钛升华泵的性能测试

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摘要

A simple, filament type, titanium sublimation pump is tested for its performance at ultrahigh vacuum. The pump consists of three individual Titanium-Molybdenum (80/20) alloy filaments of 2.1mm diameter each. The pump is enclosed in a clean ultrahigh vacuum chamber, with a thin-walled liquid nitrogen shroud around. Data on the pumping speed characteristics at various pressures with chilled water and liquid nitrogen cooling and the ultimate vacuum obtained in the system is presented. Analysis of pumping characteristics for different gases, in particular the pumping speed for Hydrogen, as measured from the reduction of partial pressures with a Quadrupole Mass Spectrometer is also highlighted.
机译:在超高真空测试其性能简单,灯丝型钛升华泵。该泵由三个单独的钛 - 钼(80/20)合金长丝组成,每个钛合金长丝为2.1mm。将泵封闭在清洁的超高真空室中,具有薄壁玻璃氮罩。提出了关于各种压力下的泵送速度特性的数据,并呈现了系统中获得的液氮冷却的各种压力和最终真空。还突出了不同气体的泵送特性,特别是氢气的泵送速度,从用四极孔质谱仪的降低测量。

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