PLD Growth of High Reflective All-Oxide Bragg Reflectors for ZnO Resonators

摘要

We report on high-reflective all-oxide Bragg reflectors for future applications in ZnO based resonators. Our YSZ-Al_2O_3 Bragg reflectors were grown by pulsed laser deposition and show reflectivity values of up to 99.99% with a layer pair number of 15.5. A very smooth surface roughness of R_a = 0.8 nm was observed for these Bragg reflectors. By using these Bragg reflectors, we were able to reproducibly grow well tuned microcavity resonators with smooth interfaces, low surface roughness, top and bottom Bragg Reflectors with almost identical properties, and quality factors of about 500.