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Electron-anion separation in electronegative rf microdischarges

机译:电负电气射频微探剂中的电子阴离子分离

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Several types of double-layer structures have been reported previously in the literature and the stratification of negatively charged species in electronegative discharges is a well known phenomena. Here we report on the evolution of a different type of double layer structure found in electronegative microplasmas. In these microdischarges, the electron ensemble oscillates between the electrodes forming sheaths that are larger than half the discharge gap. As the electrons oscillate, they move across and beyond a central electronegative core formed by anions. As a result of their different motion, electrons and anions are completely separated and regions of positive space charge form between the oscillating electron ensemble and the central electronegative discharge.
机译:已经在文献中报道了几种类型的双层结构,并且电负负荷物质的分层是众所周知的现象。在这里,我们报告了电负载微相域中发现的不同类型的双层结构的演变。在这些微探剂中,电子整合在形成大于排出间隙的一半的鞘之间的电极之间振荡。当电子振荡时,它们跨越并且超出由阴离子形成的中央电负电极芯。由于它们不同的运动,电子和阴离子是完全分离的,并且在振荡电子整合和中央电负电极放电之间形成正空间电荷的区域。

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