Fabrication of Epitaxially Grown PLZT Patterned Microstructures Using a Sol-Gel Method

摘要

A periodic hexagonal array consisting of PLZT crystalline square pillars, 180 nm high and 1 μm wide, epitaxially grown on a (001) Nb-doped SrTiO{sub}3 substrate was obtained using a sol-gel method. A PLZT precursor solution was cast into a resist mold patterned by electron beam lithography, then fired at 725°C for 6 minutes. Evaluation of the crystallinity of the pillars using x-ray diffraction showed that it was closer to that of a single-crystal substrate than to that of film.