In this paper, the performance of Seal Mechanism in Fine mode was investigated experimentally and it positioned by the combination of Coarse mode and Fine one. The conclusions can be drawn as follows. (1) The relative positioning within an extendable range of the piezoelectric actuators was possible by the induced charge feedback. (2) The absolute positioning that combined the coarse mode and fine mode was possible by the displacement feedback. (3) Only 2 DOFs, the x- and y-directions were controllable in Fine mode. However the final error of the θ-direction is less than the tolerance in the θ-direction in Carouse mode. Ministry of Education, Sports, Culture, Science and Technology, Japan and grant-in-Aid for Scientific Research (C) (2) (13650289) from Japan Society for the Promotion of Science.
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