CARBON NANOTUBES BY Low TEMPERATURE THERMAL CVD PROCESSFOR FED APPLICATIONS.

摘要

Multi Walls Nano Tubes (MWNT) distributed uniformly on catalyst metal coated silicon substrate have been synthesized by Thermal Chemical Vapour Deposition using C2H2 at 550°C. The growth and emission properties are studied as a function of the catalyst layer thickness. Large areas of nanotubes films exhibiting length up to 3 pm and diameter from 10 to 80 nm have been produced. Applications to field emission displays (FED) are demonstrated. Indeed integration of these tubes on triode structure has been done successfully. Peak current density up to 10 mA/cm' has been measured with 120 Von the gate and 1000 Von the anode..