Belt attached low temperature CVD system and method for systhesizing carbon nanotubes using the system

摘要

PURPOSE: A method for producing carbon nano tube in commercial quantity is provided, which is more economical than conventional methods using quartz tube by employing a belt-type thermochemical deposition apparatus that can produce continuously carbon nano tube. CONSTITUTION: The manufacturing method of carbon nano tube comprises the steps (i) depositing a transition metal thin layer on a substrate(10) to a thickness of 20 to 50nm through thermochemical deposition or sputtering method; (ii) placing the substrate on a grate plate(1) being rotated continuously; (iii) etching the transition metal thin layer formed on the surface of the substrate to induce the growth of grains, wherein ammonia gas/hydrogen gas(80-1000sccm) is introduced to 1st reaction zone of which temperature is controlled within the temperature range of 800 to 850deg.C; (iv) introducing carbonizing gas such as acetylene gas, ethylene gas, propane gas, propane gas or methane gas to 2nd reaction zone controlled in the temperature range of 500 to 550deg.C to form carbon nano tube from the grains, wherein the carbonizing gas is fed into the 2nd reaction zone in an amount of 20 to 1000sccm.