Further miniaturization and modularization are current trends in micro- and nanotechnology that require precision 3D-coordinate measurements. Probing ball diameters in the range of some 100 μm and probing forces in the mN down to the μN range are required. Conventional coordinate measuring machines (CCM) do not supply such small probing balls and moreover their measurement uncertainties of about 1 μm are not sufficient for many applications. A key topic in this context are probing tools for this new generation of high precision CCM's because they -as first part in the measuring chain- directly influence the accuracy of the total system. Therefore in the past years some new approaches have been made to develop and realize a new generation of probing tools for high precision CCM's using micro technology fabrication methods (1). These activities are based on a three axial tactile force sensor concept which showed to be capable to be used as micro probe (1).
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