首页> 外国专利> Three -dimensional microstructure , assembly with a microstructure of at least two three -dimensional , use of the methods and microstructure for the fabrication of microstructures

Three -dimensional microstructure , assembly with a microstructure of at least two three -dimensional , use of the methods and microstructure for the fabrication of microstructures

机译:三维微观结构,具有至少两个三维的微观结构的组装,该方法和微观结构在制造微观结构中的用途

摘要

A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 μm-200 μm. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 μm-100 μm. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed.
机译:三维微结构具有多个相邻的微柱,它们彼此间隔一定距离并且相对于各自的纵向延伸基本平行。所述微柱由至少一种微柱材料制成,所述微柱材料具有分别在20-1000的范围内的长宽比和在0.1μm-200μm的范围内的微柱直径。微柱中间腔室布置在相邻的微柱之间,该微柱中间腔具有从相邻的微柱之间选择的微柱距离在1μm-100μm的区域中。根据一种用于制造三维微结构的方法:a)为模板提供模板材料,b)将微柱材料设置在圆柱状空腔中,以及c)至少部分去除模板。

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