New Micro Probe for Dimensional Metrology based on a Silicon Microstructure

摘要

A new layout for the piezoresistiv elements of a micro mechanical three-axial tactile sensor was developed and fabricated using bulk silicon micro machining. Instead of the 24 single piezoresistors in the old design for complete wheatstone bridges where placed at the transient regions between the supporting frame and the diaphragm reducing the number of contacts to 16. Calibration was performed and showed high linearity and resolution.